Quality ellipsometers can detect film and surface conditions less than an. software and USB upgrades Older ellipsometer models interfaced to old computers can be upgraded to a USB. Ellipsometers give non-contact thickness and refractive index measurements of.
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The light beam, the state of polarization of which is to be determined, strikes, at oblique angles of incidence, three photodetector surfaces in succession, each of which is partially spectrally reflecting and each of which generates an electrical signal proportional to the fraction of the radiation it absorbs.
Although there are ways to boost the signal strength and capture more scattered light, dealing with depolarization is much more difficult and requires the determination of the complete state of polarization namely the measurement of the 4 stokes parameters S0s1s2s3. Two and Three Wavelength Ellipsometers use additional laser sources to analyze difficult films. Laser sources have the added advantage of being spectrally precise, stable and long lasting.
Polarizer and analyzer modules mount onto window flanges outside your CVD, electron-beam, MBE, sputtering reactor or chamber. Similar light source used by NIST to produce eolipsometer standards. Accurate, stable measurements using spectrally precise laser ellipsometry. Stokes Ellipsometers comply with European safety directives and carry the CE mark.
Gaertner Scientific LSE-WS Stokes WaferSkan Ellipsometer
M ost users will not require ellipsometer recalibration. Their use permits optimum instrument design in optics, detectors and other components so that measurements can be made highly accurate. Measures complete state of polarization useful for rough,scattering samples. Helps with difficult to measure films. An outstanding feature is the Stokes Ellipsometer’s compensation for small changes in angular beam deviation caused by sample out-of-flatness; thus permitting fast, uninterrupted measurement over the entire wafer surface without the need to pause to correct for focus and tilt.
The white lines is a region of Autofix Nf1 where the index cannot be easily resolved. Laser sources have the added advantage of being spectrally precise, stable and long lasting.
Gaertner Scientific Corporation – Ellipsometers – Stokes Ellipsometer LSE
Sub-Angstrom over most of the measurement range. From thin gate oxides only tens of angstroms thick to thick polyimides and photoresists Gaertner has earned a reputation for providing precise, reliable results. The units’ simple robust design offers ease of use at lowcost. The 4×4 instrument matrix A must be nonsingular, which requires that the planes ellipaometer incidence for the first three detector surfaces are all different.
The stages move automatically in rapid yet precise steps under programmed computer control. Variable Dllipsometer Stokes Ellipsometer LS The LS with a manual hand positioning stage makes measurements of film thickness and film refractive index in milliseconds.
Please identify the cable connector on your ellipsometer when placing an order.
The light beam, the state of polarization of which is to be determined, strikes, at oblique angles of incidence, three photodetector surfaces in succession, each of which is partially spectrally reflecting and each of which generates an electrical gzertner proportional to the fraction of the radiation it absorbs.
Areas as small as 15 X 45 micron can be measured. This permits fast, uninterrupted scanning over the entire wafer surface without the need to pause to correct for focus and tilt. As with any bright source such as the sun or arc lamp, the operator should not stare directly into the laser beam or into its reflection from highly reflecting surfaces.
The aqua color lines are lines of constant top layer film refractive index Nf1. The white lines are regions of Autofix of Nf1 since the index cannot be easily resolved in this region. Monolayer organic films are an excellent application for the precision and stability of the model LSE.
Here are a few examples: These readings are then converted into film thickness and film refractive index by using tables, graphs, or personal computers. Built-in axis of rotation of incident arms in the sample plane means that incidence angles are easily set with no need for alignment prisms.
Simple, compact tabletop instrument – competitively priced. Typical lifetime is greater than 3 years. At 70 degrees incidence, 15 X 52 micron sample areas can be measured.
The text file can later be opened and edited by any text-editing program such as Microsoft Notebook or Excel. Docking pedestal can be separated to accommodate 2 inch thick samples or special fixturing. We are proud of our past involvement and look forward to supplying our customers with instruments of the finest quality.
Gaertner L117 Ellipsometer
Manually adjusted tilt and table height using the computer alignment screen. LGEMP Windows software is versatile and can measure single ellipsometter films such as oxides, nitrides and photoresists as well the top layer on a known ellipskmeter, 2, or 3 layer stack such as poly on oxide and oxide on poly on oxide. The space-saving design features a small footprint yet it can accommodate large samples up to mm wide. Few measuring techniques are as direct or inherently as precise as ellipsometry.
The measuring polarized light can range from the ultra violet to the Infrared.